Beneq Strengthens Its Lead in High-volume Industrial ALD

ESPOO, Finland, July 20, 2016 /PRNewswire/ --

New Beneq R11(TM) and Beneq T2S(TM) products introduced at ALD2016

Beneq, the leading supplier of ALD equipment and thin film coating services, today announced two new thin film equipment solutions for industrial customers that require high capacity and low process cost in advanced ALD applications. The new products are set to revolutionize the standards of coating speed in the ALD industry. 

Beneq R11(TM) - Ultra-fast high precision spatial ALD coating 

Beneq R11 is the latest addition to Beneq's extensive portfolio of large-throughput spatial ALD solutions for industrial use. It provides an optimal solution for high performance ALD on wafers in industrial applications. It is the ideal choice of equipment when speed, cost, low process temperature and the highest possible film quality are the driving factors.

With Beneq R11, it is for the first time possible to use PEALD (Plasma Enhanced ALD) processes in high volume manufacturing. The system lends itself to barrier, insulation and anti-corrosion applications for MEMS, LED, OLED, photovoltaics, high power semiconductors, sensors and others.

Beneq T2S(TM) - Automated batch wafer equipment 

Beneq T2S is the newest member of Beneq's wafer-based production equipment portfolio. It offers a unique combination of high capacity batch processing and standard cassette-to-cassette automation. The Beneq T2S is specifically engineered to match the semiconductor requirements, including the SEMI S2 safety requirements and low particle counts.

Beneq T2S is perfectly suited for high volume manufacturing in various wafer-based applications, including MEMS, LED, OLED, ink-jet print heads and more. The thermal batch ALD process of Beneq T2S is ideal for oxide and nitride processes used for dielectric, conductor, barrier and passivation purposes.

New products officially unveiled in ALD2016 in Ireland 

Both new products, Beneq R11 and Beneq T2S, will be introduced officially next week at ALD2016 - the 16th International Conference on Atomic Layer Deposition in Dublin, Ireland.

Beneq(R) is the leading supplier of ALD equipment and thin film coating services, and world's premier manufacturer of ALD-based thin film electroluminescent displays. 

Beneq thin film solutions improve the performance and durability of electronics, optics and sensitive materials, and protect from humidity, corrosion and tarnishing. 

Beneq's rugged, transparent and customized Lumineq(R) displays are used in a wide array of applications in extreme conditions. Fully transparent Lumineq TASEL(R) displays combine superior reliability with a unique see-through viewing experience.



Further information: 

Matias Impivaara, Head of Marketing and Communications, +358-9-7599-530.


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